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1

Modeling of chemical mechanical polishing processes by cellular automata and finite element/matlab integration methods

Chen, Kuo-Shen, Wu, Shang-Lun, Yeh, Hsiu-Ming

Journal:

Microsystem Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 4.04 MB

english, 2015

2

Equivalent strengths for reliability assessment of MEMS structures

Kuo-Shen Chen, Kuang-Shun Ou

Journal:

Sensors and Actuators A: Physical

Année:

2004

Langue:

english

Fichier:

PDF, 439 KB

english, 2004

3

Thermo-mechanical behavior of thick PECVD oxide films for power MEMS applications

Xin Zhang, Kuo-Shen Chen, S. Mark Spearing

Journal:

Sensors and Actuators A: Physical

Année:

2003

Langue:

english

Fichier:

PDF, 386 KB

english, 2003

4

Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

Kuo-Shen Chen,, Ayon, A.A., Xin Zhang,, Spearing, S.M.

Journal:

Journal of Microelectromechanical Systems

Année:

2002

Langue:

english

Fichier:

PDF, 442 KB

english, 2002

5

Design and vibration control of a notch-based compliant stage for display panel inspection applications

Wang, Wei-Chih, Lee, Jer-Wei, Chen, Kuo-Shen, Liu, Yun-Hui

Journal:

Journal of Sound and Vibration

Année:

2014

Langue:

english

Fichier:

PDF, 5.00 MB

english, 2014

6

Buckling and Postbuckling Failure Analyses on a Rectangular Membrane for Touch Panel Applications

Chuang, Chang-Hsin, Chang, Yu-Kai, Chen, Kuo-Shen, Chen, Chun-Chih

Journal:

IEEE Transactions on Device and Materials Reliability

Année:

2017

Langue:

english

Fichier:

PDF, 907 KB

english, 2017

7

[IEEE 2019 IEEE International Conference on Mechatronics (ICM) - Ilmenau, Germany (2019.3.18-2019.3.20)] 2019 IEEE International Conference on Mechatronics (ICM) - Finite Element Input Shaping Design for Vibration Suppression of Mechatronics Systems

Chen, Weiju, Chen, Kuo-Shen, Tsai, Mi-Ching

Année:

2019

Langue:

english

Fichier:

PDF, 802 KB

english, 2019

8

[IEEE 2019 International Conference on Electronics Packaging (ICEP) - Niigata, Japan (2019.4.17-2019.4.20)] 2019 International Conference on Electronics Packaging (ICEP) - Thermo-Mechanical Process Emulation and Sensitivity Analysis of Wafer Warpage after Reconstitution in Fan-out Packaging

Yang, Cheng-Ying, Chen, Kuo-Shen, Yang, Tian-Shian g, Chiu, Tz-Cheng, Ho, Ching-Jenq

Année:

2019

Langue:

english

Fichier:

PDF, 2.95 MB

english, 2019

9

Design of command shapers for residual vibration suppression in Duffing nonlinear systems

Kuo-Shen Chen, Tian-Shiang Yang, Kuang-Shun Ou, Jui-Feng Yin

Journal:

Année:

2009

Langue:

english

Fichier:

PDF, 683 KB

english, 2009

10

Intrinsic stress generation and relaxation of plasma-enhanced chemical vapor deposited oxide during deposition and subsequent thermal cycling

Kuo-Shen Chen, Xin Zhang, Shih-Yuan Lin

Journal:

Thin Solid Films

Année:

2003

Langue:

english

Fichier:

PDF, 795 KB

english, 2003

11

Synergetic effects of wafer rigidity and retaining-ring parameters on contact stress uniformity in chemical mechanical planarization

Ian Hu, Tian-Shiang Yang, Kuo-Shen Chen

Journal:

The International Journal of Advanced Manufacturing Technology

Année:

2011

Langue:

english

Fichier:

PDF, 896 KB

english, 2011

12

Development and verification of 2D dynamic electromechanical coupling solver for micro-electrostatic-actuator applications

Kuo-Shen Chen, Kuang-Shun Ou

Journal:

Sensors and Actuators A: Physical

Année:

2007

Langue:

english

Fichier:

PDF, 941 KB

english, 2007

13

Nanoindentation fracture and fatigue characterization of PECVD silicon nitride films subjected to rapid thermal annealing

Huang, Zhi-Kai, Chen, Kuo-Shen

Journal:

Sensors and Actuators A: Physical

Année:

2014

Langue:

english

Fichier:

PDF, 6.67 MB

english, 2014

14

On the influence of roller misalignments on the web behavior during roll-to-roll processing

Chen, Kuo-Shen, Ou, Kuang-Shun, Liao, Yen-Ming

Journal:

Journal of the Chinese Institute of Engineers

Année:

2011

Langue:

english

Fichier:

PDF, 3.52 MB

english, 2011

15

A Novel Semianalytical Approach for Finding Pull-In Voltages of Micro Cantilever Beams Subjected to Electrostatic Loads and Residual Stress Gradients

Ou, Kuang-Shun, Chen, Kuo-Shen, Yang, Tian-Shiang, Lee, Sen-Yung

Journal:

Journal of Microelectromechanical Systems

Année:

2011

Langue:

english

Fichier:

PDF, 1.06 MB

english, 2011

16

Design and Control of a Piezoelectric Driven Fatigue Testing System for Electronic Packaging Applications

Chen, Kuo-Shen, Chen, Bor-Zone, Huang, Chi-Chuan

Journal:

IEEE Transactions on Components and Packaging Technologies

Année:

2006

Langue:

english

Fichier:

PDF, 1.01 MB

english, 2006

17

Viscoelastic Characterization and Modeling of Polymer Transducers for Biological Applications

I-Kuan Lin,, Kuang-Shun Ou,, Yen-Ming Liao,, Yan Liu,, Kuo-Shen Chen,, Xin Zhang,

Journal:

Journal of Microelectromechanical Systems

Année:

2009

Langue:

english

Fichier:

PDF, 1.59 MB

english, 2009

18

Full-field wafer level thin film stress measurement by phase-stepping shadow Moire/spl acute/

Kuo-Shen Chen,, Chen, T.Y.-F., Chia-Cheng Chuang,, Lin, I.-K.

Journal:

IEEE Transactions on Components and Packaging Technologies

Année:

2004

Langue:

english

Fichier:

PDF, 1.32 MB

english, 2004

19

Command-Shaping Techniques for Electrostatic MEMS Actuation: Analysis and Simulation

Chen, Kuo-Shen, Ou, Kuang-Shun

Journal:

Journal of Microelectromechanical Systems

Année:

2007

Langue:

english

Fichier:

PDF, 1.14 MB

english, 2007

20

Structural Design of a Silicon Micro-Turbo-Generator

Chen, Kuo-Shen, Spearing, S. Mark, Nemeth, Noel N.

Journal:

Année:

2001

Langue:

english

Fichier:

PDF, 547 KB

english, 2001

21

Pull-in Voltage Estimation of Microcantilever Beams With Effects of Residual Stress Gradients and Capacitance Fringing

Ou, Kuang-Shun, Chen, Kuo-Shen

Journal:

IEEE Transactions on Device and Materials Reliability

Année:

2014

Langue:

english

Fichier:

PDF, 344 KB

english, 2014

22

Mechanical Characterization of Atomic Layer Deposited (ALD) Alumina for Applications in Corrosive Environments

Ou, Kuang-Shun, Lin, I-Kuan, Wu, Ping-Hsin, Huang, Zhi-Kai, Chen, Kuo-Shen, Zhang, Xin

Journal:

MRS Proceedings

Année:

2009

Langue:

english

Fichier:

PDF, 605 KB

english, 2009

23

Realization and performance assessment of a force-sensing based smart floor panel for indoor localization applications

Cheng, Chung-Hao, Wu, Ming-Feng, Guo, Shu-Heng, Chen, Kuo-Shen

Journal:

Sensors and Actuators A: Physical

Année:

2019

Langue:

english

Fichier:

PDF, 4.66 MB

english, 2019

24

Reconstituted Wafer Deformation Analysis Through Whole Process Emulation

Yang, Cheng-Ying, Chen, Kuo-Shen, Yang, Tian-Shiang

Journal:

IEEE Transactions on Device and Materials Reliability

Année:

2020

Langue:

english

Fichier:

PDF, 1.92 MB

english, 2020

25

Characterization and Image-Based Performance Evaluation on the Longevity of LCDs Under High Temperature and Humid Environment

Chang, Yu-Kai, Chen, Kuo-Shen, Chen, Chun-Chih

Journal:

IEEE Transactions on Device and Materials Reliability

Année:

2020

Langue:

english

Fichier:

PDF, 155 KB

english, 2020

26

Development of semi-empirical formulation for extracting materials properties from nanoindentation measurements: Residual stresses, substrate effect, and creep

Kuo-Shen Chen, Tuo-Cheng Chen, Kuang-Shun Ou

Journal:

Thin Solid Films

Année:

2008

Langue:

english

Fichier:

PDF, 1.14 MB

english, 2008

27

Optimization of separation and migration behavior of cephalosporins in capillary zone electrophoresis

Ching-Erh Lin, Hung-Wen Chen, Erick C. Lin, Kuo-Shen Lin, Hui-Chun Huang

Journal:

Journal of Chromatography A

Année:

2000

Langue:

english

Fichier:

PDF, 699 KB

english, 2000

28

Electromagnets calibration utilizing the pull-in instability

Kuo-Shen Chen, Cheng-Chung Ho

Journal:

Precision Engineering

Année:

2004

Langue:

english

Fichier:

PDF, 581 KB

english, 2004

29

Behavior and surface energies of polybenzoxazines formed by polymerization with argon, oxygen, and hydrogen plasmas

Jem-Kun Chen, I-Kuan Lin, Fu-Hsiang Ko, Chih-Feng Huang, Kuo-Shen Chen, Chia-Hao Chan, Feng-Chih Chang

Journal:

Journal of Polymer Science Part B: Polymer Physics

Année:

2004

Langue:

english

Fichier:

PDF, 853 KB

english, 2004

30

Development of a pad conditioning simulation module with a diamond dresser for CMP applications

Hsiu-Ming Yeh, Kuo-Shen Chen

Journal:

The International Journal of Advanced Manufacturing Technology

Année:

2010

Langue:

english

Fichier:

PDF, 1.16 MB

english, 2010

31

A command shaping approach to enhance the dynamic performance and longevity of contact switches

Kuang-Shun Ou, Kuo-Shen Chen, Tian-Shiang Yang, Sen-Yung Lee

Journal:

Année:

2009

Langue:

english

Fichier:

PDF, 1014 KB

english, 2009

32

Controlling and Testing the Fracture Strength of Silicon on the Mesoscale

Kuo-Shen Chen, Arturo Ayon, S. Mark Spearing

Journal:

Journal of the American Ceramic Society

Année:

2000

Langue:

english

Fichier:

PDF, 344 KB

english, 2000

33

Electrochemical reduction of C60 and C70 films in N(Me)4(CIO4)/MeCN

Wen-Jwu Wang, Shu-Shiuh Lin, Haw-Shyi Chiu, Chen-Shen Chang, Kuo-Shen Chuang, Bo-Cheng Wang

Journal:

Synthetic Metals

Année:

1997

Langue:

english

Fichier:

PDF, 232 KB

english, 1997

34

Synthesis, spectroscopic and magnetic properties of the charge-transfer complex Bifc.C60

Wen-Jwu Wang, Y.L. Lay, Chen-Shen. Chang, Haw-Shyi Chiu, Kuo-Shen Chuang, Bo-Cheng Wang

Journal:

Synthetic Metals

Année:

1997

Langue:

english

Fichier:

PDF, 218 KB

english, 1997

35

Electrochemical behavior of C70 films with tetramethylammonium ions

Wen-Jwu Wang, Haw-Shyi Chin, Chen-Shen Chang, Kuo-Shen Chuang, Shu-Shiuh Lin

Journal:

Synthetic Metals

Année:

1999

Langue:

english

Fichier:

PDF, 210 KB

english, 1999

36

Synthetic Conducting Materials. XIII. Charge Transfer Complexe of 1,3-di-hexadecanylimidazolium with TCNQ

Wen-Jwu Wang, Mei-Jung Hu, Chen-Shen Chang, Kuo-Shen Chuang, Haw-Shyi Chiu, Chou-Fu Sheu

Journal:

Synthetic Metals

Année:

1999

Langue:

english

Fichier:

PDF, 203 KB

english, 1999

37

Development of a Digital-Convolution-Based Process Emulator for Three-Dimensional Microstructure Fabrication Using Electron-Beam Lithography

Hsiu-Ming Yeh, Kuo-Shen Chen

Journal:

IEEE Transactions on Industrial Electronics

Année:

2009

Langue:

english

Fichier:

PDF, 1.34 MB

english, 2009

38

A one-dimensional touch panel based on strain sensing

Chia-Hsing Pi, I-Fang Tsai, Kuang-Shun Ou, Kuo-Shen Chen

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 1.38 MB

english, 2012

39

[American Institute of Aeronautics and Astronautics 40th Structures, Structural Dynamics, and Materials Conference and Exhibit - St. Louis,MO,U.S.A. (12 April 1999 - 15 April 1999)] 40th Structures, Structural Dynamics, and Materials Conference and Exhibit - Structural design of a silicon micro turbo generator

Chen, Kuo-Shen, Spearing, S., Nemeth, Noel

Année:

1999

Langue:

english

Fichier:

PDF, 1018 KB

english, 1999

40

Obituary

Huang, Zhi-Kai, Chen, Kuo-Shen

Journal:

Année:

1948

Langue:

english

Fichier:

PDF, 401 KB

english, 1948

41

A strain-sensing based scheme for indoor localization: Analysis, algorithm, and demonstration

Pi, Chia-Hsing, Chen, Kuo-Shen

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 3.26 MB

english, 2014

42

Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies

Chen, Kuo-Shen, Lin, I-Kuan, Ko, Fu-Hsang

Journal:

Journal of Micromechanics and Microengineering

Année:

2005

Langue:

english

Fichier:

PDF, 1.05 MB

english, 2005

43

Electrochemical Doping of Tetramethylammonium Ions into C 60 Film

Wang, Wen-Jwu, Chiu, Haw-Shyi, Lin, Shu-Shiuh, Chang, Chen-Shen, Chuang, Kuo-Shen

Journal:

Fullerene Science and Technology

Année:

1998

Langue:

english

Fichier:

PDF, 318 KB

english, 1998

44

Tandem production of levan and ethanol by microbial fermentation

Shih, Ing-Lung, Chen, Li-Dar, Wang, Tsaur-Chin, Wu, Jane-Yii, Liaw, Kuo-Shen

Journal:

Green Chemistry

Année:

2010

Langue:

english

Fichier:

PDF, 285 KB

english, 2010

45

Viscoelastic mechanical behavior of soft microcantilever-based force sensors

Lin, I-Kuan, Liao, Yen-Ming, Liu, Yan, Ou, Kuang-Shun, Chen, Kuo-Shen, Zhang, Xin

Journal:

Applied Physics Letters

Année:

2008

Langue:

english

Fichier:

PDF, 570 KB

english, 2008

46

[Japan Soc. of Appl. Phys Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (29-31 Oct. 2003)] Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference - Plasma resistance and behavior of polybenzoxazine polymer

Jem-Kun Chen,, I-Kuang Lin,, Fu-Hsiang Ko,, Feng-Chih Chang,, Kuo-Shen Chen,

Année:

2003

Langue:

english

Fichier:

PDF, 105 KB

english, 2003

47

Elastic and Viscoelastic Characterization of Polydimethylsiloxane (PDMS) for Cell-Mechanics Applications

Lin, I-Kuan, Liao, Yen-Ming, Liu, Yan, Chen, Kuo-Shen, Zhang, Xin

Journal:

MRS Proceedings

Année:

2007

Langue:

english

Fichier:

PDF, 716 KB

english, 2007

48

SPIE Proceedings [SPIE SPIE's 7th Annual International Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 6 March 2000)] Smart Structures and Materials 2000: Smart Structures and Integrated Systems - Microhydraulic transducer technology for actuation and power generation

Hagood, Nesbitt W., Roberts, David C., Saggere, Laxminarayana, Breuer, Kenneth S., Chen, Kuo-Shen, Carretero, Jorge A., Li, Hanqing, Mlcak, Richard, Pulitzer, Seward W., Schmidt, Martin A., Spearing,

Année:

2000

Langue:

english

Fichier:

PDF, 1.96 MB

english, 2000

49

[IEEE 2014 16th International Conference on Mechatronics - Mechatronika (ME) - Brno, Czech Republic (2014.12.3-2014.12.5)] Proceedings of the 16th International Conference on Mechatronics - Mechatronika 2014 - Sensor failure detection in autonomous mobile robot application

Vechet, Stanislav, Krejsa, Jiri, Chen, Kuo-Shen

Année:

2014

Langue:

english

Fichier:

PDF, 618 KB

english, 2014

50

Analysis of Experimental Data for Metallic Impurity Out-Diffusion from Deep-UV Photoresist

Yang, Tian-Shiang, Hsu, Nien-Tzong, Chen, Kuo-Shen, Ko, Fu-Hsiang

Journal:

Journal of The Electrochemical Society

Année:

2004

Langue:

english

Fichier:

PDF, 600 KB

english, 2004